An Introduction to MEMS (Micro-electromechanical Systems)

Mems Introduction.rar
(2008-09-15 21:45:12, Size: 1.34 MB, Downloads: 62)

Classifications……………………………………………………3
2.3 History…………………………………………………………………………… 4
2.4 Applications……………………………………………………………………….6
2.4.1 Established MEMS Applications…………………………………………………..7
2.4.2 New MEMS Applications…………………………………………………………11
2.5 MEMS Market……………………………………………………………………14
2.6 Miniaturization Issues……………………………………………………………15
3. MEMS Fabrication Methods……………………………………………………….. 17
3.1 Photolithography…………………………………………………………………17
3.2 Materials for Micromachining……………………………………………………18
3.2.1 Substrates…………………………………………………………………………18
3.2.2 Additive Films and Materials……………………………………………………..19
3.3 Bulk Micromachining…………………………………………………………….20
3.3.1 Wet Etching……………………………………………………………………….20
3.3.2 Dry Etching……………………………………………………………………….21
3.4 Surface Micromachining…………………………………………………………21
3.4.1 Fusion Bonding……………………………………………………………………23
3.5 High-Aspect-Ratio-Micromachining……………………………………………. 23
3.5.1 LIGA……………………………………………………………………………...23
3.5.2 Laser Micromachining……………………………………………………………24
3.6 Computer Aided Design………………………………………………………….24
3.7 Assembly and System Integration………………………………………………..25
3.8 Packaging………………………………………………………………………... 27
3.8.1 Multi-Chip Modules………………………………………………………………28
3.8.2 Passivation and Encapsulation……………………………………………………29
3.9 Foundry Services…………………………………………………………………29
4. MEMS Transducers………………………………………………………………… 30
4.1 Mechanical Transducers………………………………………………………….31
4.1.1 Mechanical Sensors……………………………………………………………….31
4.1.2 Mechanical Actuators……………………………………………….……………32
4.2 Radiation Transducers……………………………………………………………34
4.2.1 Radiation Sensors………………………………………………………………... 34
4.2.2 Radiation (Optical) Actuators…………………………………………………….34
4.3 Thermal Transducers……………………………………………………………..35
4.3.1 Thermal Sensors…………………………………………………………………..35
4.3.2 Thermal Actuators……………………………………………………………..….35
4.4 Magnetic Transducers……………………………………………………………36
4.4.1 Magnetic Sensors…………………………………………………………………36
4.4.2 Magnetic Actuators…………………………………………………………….…37
4.5 Chemical and Biological Transducers……………………………………………37
4.5.1 Chemical and Biological Sensors………………………………………………... 37
4.5.2 Chemical Actuators……………………………………………………………….39
4.6 Microfluidic Devices……………………………………………………………. 39
An Introduction to MEMS
PRIME Faraday Technology Watch ii
5. Future of MEMS……………………………………………………………………. 41
5.1 Industry Challenges…………………………………………………………….. 41
5.2 The Way Ahead………………………………………………………………… 43
References………………………………………………………………………………….43
Appendix A Glossary of Terms………………………………………………………..46
Appendix B Sources of MEMS Information and Advice……………………………48